Lehrinhalte
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[*]Introduction & motivation
[*]Electronic devices & materials
[*]Reliability: The basics & definitions
[*]Test procedures & data analysis
[*]Scaling & Reliability
[*]Failure mechanisms
[*]Lifetime predictions
[*]Electrostatic Discharge (ESD)
[*]Outlook: Future developments
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Literatur
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[*]Lecture slides
[*]M. Ohring: Reliability and Failure of Electronic Materials and Devices, Academic Press, 1998
[*]E. A. Amerasekera, F. N. Najm: Failure Mechanisms in Semiconductor Devices, John Wiley & Sons, 1998
[*]A. G. Sabnis: VLSI Reliability
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Voraussetzungen
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[*]Electrical Measuring Techniques
[*]Laboratory Measuring Techniques
[*]Microelectronic devices - the basics
[*]Electrical Engineering and Information Technology 1
[*]Electrical Engineering and Information Technology 2
[*]Laboratory ETiT 1
[*]Laboratory ETiT 2
[*]Mathematics 1
[*]Mathematics 2
[*]Introductory Physics
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Bemerkung Webportal
Why teaching a lecture on reliability in microelectronics? Engineering education mainly deals with functionality, design and fabrication of electronic devices and circuits. Only rarely it concentrates on the question, why devices and circuits fail. On the contrary, reliability issues become more and more important in microelectronics due to the progress of miniaturization and further increasing packing density. Within the scope of this lecture the students will be introduced to the field of reliability of electronic materials and microelectronic devices and get to learn the basic definitions as well as the tools of the reliability methodology. Furtheron, the different failure mechanisms and their effects in semiconductor devices and circuits are covered.

Semester: Verão 2019