Lehrinhalte
Introduction and definitions to micro system technology; definitions, basic aspects of materials in micro system technology, basic principles of micro fabrication technologies, functional elements of microsystems, micro actuators, micro fluidic systems, micro sensors, integrated sensor-actuator systems, trends, economic aspects.
Literatur
Script for lecture: Mikrosystemtechnik
Voraussetzungen
BSc
Introduction and definitions to micro system technology; definitions, basic aspects of materials in micro system technology, basic principles of micro fabrication technologies, functional elements of microsystems, micro actuators, micro fluidic systems, micro sensors, integrated sensor-actuator systems, trends, economic aspects.
Literatur
Script for lecture: Mikrosystemtechnik
Voraussetzungen
BSc
- Lehrende: Thomas Burg
- Lehrende: Mario El Khoury
- Lehrende: Daniel Thiem
Semester: Inverno 2019/20