Homepage
Homepage of the research group "Integrated Micro-Nano-Systems (IMNS)":
https://www.etit.tu-darmstadt.de/micronano/imns_topmenu/index~1.de.jsp
Topics
Introduction and definitions to micro system technology; definitions, basic aspects of materials in micro system technology, basic principles of micro fabrication technologies, functional elements of microsystems, micro actuators, micro fluidic systems, micro sensors, integrated sensor-actuator systems, trends, economic aspects.
Literature
Script for lecture: "Mikrosystemtechnik" by Prof. Schlaak
Prerequisites
BSc
Homepage of the research group "Integrated Micro-Nano-Systems (IMNS)":
https://www.etit.tu-darmstadt.de/micronano/imns_topmenu/index~1.de.jsp
Topics
Introduction and definitions to micro system technology; definitions, basic aspects of materials in micro system technology, basic principles of micro fabrication technologies, functional elements of microsystems, micro actuators, micro fluidic systems, micro sensors, integrated sensor-actuator systems, trends, economic aspects.
Literature
Script for lecture: "Mikrosystemtechnik" by Prof. Schlaak
Prerequisites
BSc
- Lehrende: Thomas Burg
- Lehrende: Daniel Thiem
Semester: Inverno 2022/23