Basics of scanning electron microscopy;
Breakdown of scanning electron microscopes (SEM)
Electron and x-ray detectors
Analysis of topography with secondary electrons
Back scattered electrons for materials contrast
Characteristic x-rays for microanalysis
Sample preparation for SEM studies
Introduction to the SEM Philips XL30-FEG: access to the SEM is granted for the course participants
Literatur
1. J. Goldstein et al., Scanning Electron Microscopy and X-ray Microanalysis, fourth edition, Springer Science + Business Media, New York 2018, DOI: https://doi.org/10.1007/978-1-4939-6676-9
2. L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, 2nd edition, Springer-Verlag 1998.
Voraussetzungen
M.Sc. and Ph.D. students of the departments of Materials Science, Physics and Chemistry
Zusätzliche Informationen
Course plan:
2 lectures: 6 academic hours
Practical exercise at the SEM Philips XL30-FEG: 4 academic hours
Report on the practical exercise part is compulsory for before examination
Examination: oral
Registration for the course for all Students (starting from the 7th Semester) is via TUCaN
Registration via e-mail is possible for those interested in the access to the SEM
- Lehrende: Philipp Komissinskiy