Kursinformation

Course Contents
Students are able to explain the structure and function of microsystemes for common applications (e.g. pressure sensors, accelerometers, biological and chemical sensors, micro-optical systems), calculate design parameters to achieve given specifications, and to judge the impact of scaling on the device performance. They can select appropriate materials, devise basic fabrication process flows, and identify compatibility issues between processes and/or materials.

Literature
Lecture notes, Moodle course

Prerequisites
BSc